Layout Knowledge Base

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Nano, when a wavelength is huge

At a few tens of nanometers, light is clumsy and neighbors donate dose. The drawing is not the print.

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Learning paths

Six reading orders through 70 notes. Start anywhere; each list goes from basic to advanced.

Chip tutorial series

Build a quadrature encoder from theory through Verilog, sky130 synthesis, OpenROAD place-and-route, and a real GDS.

  1. Slotted encoder disk with optical sensors A, B, and Index Z Part 1Theory
  2. Part 2Verilog
  3. Part 3 flow: RTL through Yosys to a gate-level netlist Part 3Yosys
  4. Part 4 flow: gate-level netlist through OpenROAD Tcl to DEF Part 4OpenROAD
  5. Part 5 flow: routed DEF through LayoutEditor to GDS and DRC Part 5GDS and DRC

The library

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That integer bargain drawn large: an uneven octagon whose corners you can name, beside a smoother chain that still lands every corner on a whole tick. Database units: how layout files store coordinates as integers A GDSII or OASIS file stores every coordinate as a whole number of database units. How that scale becomes microns, and what breaks when tools disagree. Puts the two bargains side by side: one outline with enough sides to read as a circle, and one with seven straight sides whose flats cut across the curve. Drawing circles in a layout: polygons, side count, and arc error A layout file saves a circle as a many-sided polygon. How many sides to use, how far the flats sit inside the true radius, and what the mask shop will see. A row of five standard cells, the small repeated building blocks of a chip, with a power rail running along the top and another along the bottom. Overlapping is not merging Two shapes sharing coordinates are still two objects. A merge is one outline. Factories care which you meant. Illustration: a clear microfluidic chip with blue dye in one channel network and red dye in the other, a pipette tip in an inlet well Channels, not wires A path that liquid occupies. Width is hydraulic. Dead volumes are the new parasitics. LayoutEditor view: the letters A1 as a text object on a label layer, placed over a teal metal1 strap Text on a layout: labels, printed letters, and what the mask shop ignores A GDS text record is a string on a layer; convert it to polygons before a mask shop must print it. SKY130 68/5 labels stay unchecked; 68/20 outlines are measured. That frame twice at once. Left of the dark blue line are the pieces as they were drawn, a dozen overlapping rectangles and a slanted bar, each still carrying its own outline. Merging polygons A merge replaces overlapping shapes on one layer with a single outline of the area they cover. Here is how that outline is computed, what the file stores, and where it goes wrong. LayoutEditor window: one SKY130 signal climbing from a plum poly gate finger through a black licon, the teal li1 strap, an amber mcon, the blue met1 strap and a purple via up to the orange met2 strap Vias and contacts in IC layout: cut layers, enclosure, and via rows Vias and contacts in a chip layout: the cut layers between floors, SKY130 via size, spacing and enclosure rules, via rows, and what a DRC cannot see. LayoutEditor view of four met1 polygons with a red marker on every stored vertex: a pad with a square hole and a horizontal cut line, an octagon, a comb, and an L Polygons in a layout: vertices, holes, and why a box is not enough A layout polygon is a closed list of vertices on one layer: how GDSII and OASIS store it, vertex order and area, holes as cut lines, broken polygons, vertex limits, and how to check them in LayoutEditor. The object without that seam: a gold rectangle, filled, with a smaller rectangular window in the middle where the drawing is empty. Holes in polygons A window in metal is a void in a polygon — keyhole, boolean NOT, or a stacked-solid lie. Merge can fill what you meant to keep open. LayoutEditor: eight small SKY130 metal 1 test cases in two rows; in the top row a narrow strap, two close straps, a contact and a via with too little metal each carry a red DRC marker, in the bottom row the repaired versions have none Design rules and DRC: real rule values and how to read a marker Design rules are the factory's limits in numbers; DRC is the spellchecker that measures them. SKY130 width, space, and enclosure values, rule flags, how to write and test a .ledrc rule deck by hand, and why deleting a marker fixes nothing. Illustration: polished cross-section of a printed circuit board under a microscope, thin copper layers between bands of fiberglass and resin, and a plated through-hole barrel crossing all layers, filled with dark resin. A PCB stackup The sandwich recipe: foils, cores, which copper is which file. Layout names must match this, not your mood. LayoutEditor window: a teal level-1 cross inside the cross-shaped window of an amber level-2 chrome square, with a horizontal and a vertical vernier of teal and amber bars to the right Alignment marks and registration Alignment marks are paired shapes on two mask levels that let an aligner, stepper, or writer place each new level on the pattern already on the wafer. A crop of a real analog-style cell block at a 0.5 µm scale bar: navy metal straps run across the top and bottom, gold poly gates cross green diffusion in the middle, dark contacts tie them up, and a salmon well region fills the right edge Analog layout is furniture: matching, dummies, and guard rings Identical schematic devices come out different on silicon. Pelgrom's area law, stress and well-edge effects, common centroid, dummy fingers, and guard-ring rules from an open PDK. A 1 µm² transistor gate tied to about 124 µm of folded metal1 while metal1 is being etched; the metal2 link to the driver is outlined because it does not exist yet Antenna rules: charge during etch Antenna rules limit the conductor area connected to a transistor gate during manufacturing, because plasma etching charges the wire; jumpers and antenna diodes fix violations. A 4 by 4 field of one small bit, with some stamps rotated so the bar does not point the same way in every position. Cell arrays and step-and-repeat: rows, columns, pitch, and AREF An array places one cell in rows and columns at a fixed pitch and is stored as one array reference (AREF in GDSII). How a wrong step adds up across the grid, and why one record has one rotation. A real logic cell, a two-input multiplexer from the open SkyWater SKY130 cell library, about 4.6 µm wide. AND, OR, NOT, XOR: layout as sets A boolean asks where two layers overlap, combine, or differ, and answers with new polygons. Transistor gates, clearances, masks, and layout comparisons are all computed this way. A handful of those four-number rectangles on different sheets, some of them overlapping. Boxes are just rectangles An axis-aligned rectangle is a native four-number object. Rotate, chamfer, or boolean it and it becomes a polygon. The parent with those four stamps, and a cross of routing that belongs to the parent. Cells and instances Draw the pad once and stamp it many times. Each stamp is the same drawing in a new place, not a photocopy of the ink. A strip of a standard-cell row at a scale bar of 0.5 µm: gold poly gates cross green and teal diffusion and local-interconnect shapes, dark contacts sit on the wiring, salmon well regions frame both ends, and the white field above and below the row carries almost nothing Density rules and fill: why empty space gets dummy shapes A density rule limits how much of each window a layer may cover. Real window sizes, why polishing cares, how fill repairs a sparse region without touching the circuit, and how to fill and check a layout in LayoutEditor. Puts three of them on one table: a framed glass plate, a round wafer, and a green board. The drawing is not the thing you build Glass, silicon, and fiberglass are different objects that can share one geometry. Illustration: a CNC-milled aluminium lid with a pocket and four mounting holes next to a small bare silicon die, the two scales on one bench. DXF from the mechanical world Arcs, inches, and layers with names like ‘Contour’. Translation is culture as much as geometry. A 200 nm mask contact in LayoutEditor three ways: the drawn 64-vertex polygon, 25 trapezoid shots, and 316 pixels of 10 nm E-beam direct write vs. mask writing: Gaussian, VSB, and multi-beam E-beam lithography writes a layout into resist without a mask, either on the wafer (direct write) or on a photomask blank; Gaussian, VSB, and multi-beam writers differ in shot count, write time, and resolution. Puts the good case and the bad case side by side: one contact fully inside its pad, one contact hanging off a corner. Enclosure is a frame for misalignment The inner feature has to sit on an island big enough that the factory’s slop cannot knock it off. The standard for that question. Thin films lie on a thick carrier. Extruding into the third dimension Give each layer a thickness and the top view becomes a toy building. Honest only if the thicknesses are. LayoutEditor window with 40 placements of a SKY130 via cell on a 0.5 µm pitch; one flattened copy has a smaller met1 landing and four red via.4a marker bands Hierarchy and flattening: why chips keep cells and boards go flat Flattening replaces cell references with transformed copies of their shapes: what GDSII SREF and AREF records store, how the transform is applied, what it costs in file size, and how to flatten and check a layout in LayoutEditor. That idea with real geometry from a layout editor: one board, six placements of one small-outline eight-pin footprint, some turned 90 or 180 degrees. Footprints are almost cells A footprint is drawn once and placed many times, so its pads, paste, courtyard, and pin 1 must be right in that one master. Where that letter arrives — a framed plate on a light table, the pattern showing as dark chrome against the lamp. From idea to something a shop can print How a napkin sketch becomes a file, a cover letter, and a glass plate a shop can print from. The pairing with the marks still on the straps. Layer and datatype: the two-number name 31/0 is not a street address. It is how GDS remembers two meanings on one film. Three records from that kind of file, drawn so a person can see them: four numbers for a rectangle, a bent centerline, and a closed outline that is not a rectangle. GDSII in plain language A 1970s suitcase that still carries almost every chip drawing on Earth. Six Gerber files of one 40 × 25 mm board read into LayoutEditor: copper tracks, pads and ground pour, solder-mask openings, component outlines, drill hits, and the board profile. What is a Gerber file? The plot format for PCB layers A Gerber file is a text file that describes one layer of a printed circuit board as a 2D vector image built from apertures, flashes, draws, and regions. One nMOS transistor as a top-view sandwich: p-well, active with n+, poly gate, contacts, and metal1, labeled S, D, G, L, and W How a MOSFET is drawn A transistor on a chip drawing is a top-view sandwich of active, poly, well, implant, and contact — not the schematic symbol. LayoutEditor window with four SKY130 standard-cell abstracts in two rows: amber and orange obstruction rectangles fill most of each cell, dark teal pin shapes and blue power rails mark where a router may connect Keepouts and blockages A keepout or blockage is a drawn region that is never manufactured; it tells a router, placer, fill generator, or board checker which objects may not be placed inside it. Six square metal1 contacts in two rows on a 10 nm display grid: in the top row the orange contact sits in a lavender metal1 pad with an even margin, with a thin margin on its left side, and with thin margins on its left and right sides, all with no markers; in the bottom row the thin margins are on the left and bottom, on three sides, and on all four sides, and each thin side carries a dark red DRC marker One of two adjacent sides: checking m1.5, li.5, and via.5a in .ledrc Some contact rules let the metal be thin on one side, or on two opposite sides, but never on two sides that meet at a corner. How to read that rule in the SKY130 table, write it by hand as one LayoutEditor check line, and prove it on a layout built to fail. LayoutEditor window showing a routed section of a SKY130 DEF: rows of gray cell outlines, blue horizontal metal 1 wires and power rails, orange vertical metal 2 wires, green metal 3 bands, and black via cuts LEF and DEF in plain language LEF describes the layers, vias, sites, and cell abstracts of a digital library; DEF describes one design built from it, with die area, rows, placed instances, pins, power grid, and wires. Illustration: grayscale electron-microscope-style cross-section of a chip interconnect stack, with the substrate at the bottom, thin metal lines in insulator above it, via columns between levels, and one tall plug joining two metal levels. Looking at a cross-section A side view of the sandwich. Layout is the top of this. MEMS people live here. LayoutEditor: above, a schematic of two resistors R1 and R2 in series with nets IN, MID and OUT; below, the layout of the same circuit as two resistor cells with metal pads and three labeled metal straps LVS: layout versus schematic, and how to read the report Schematic and layout describe one circuit in two languages. How LVS extracts nets from polygons, a LayoutEditor script that checks a layout against a SPICE netlist and against a schematic, and how to read opens, shorts, and device mismatches. One hairpin turn drawn three ways in LayoutEditor. Manhattan versus all-angle Manhattan layouts use only horizontal and vertical edges; 45-degree and all-angle layouts allow slants and curves. The choice changes wire length, how gaps are measured, which corners land on the grid, which rules apply, and what the mask costs. Illustration: SEM-style view of a released MEMS comb drive, its interleaved fingers suspended over an etched pit and held by folded springs. MEMS is layout plus a recipe The top view is not enough. You need the sandwich: deposit, etch, release. One named clk net: pin access on the left, metal1 straps and landings, a via up to metal2, with clk labels on the joined metal Nets, pins, and labels on a layout Geometry alone is not a netlist: labels name joined metal, pins mark where a named net may enter a cell. A regular field of identical contact tiles — the geometry OASIS can store with a repetition instead of dozens of separate boxes. OASIS vs GDSII: when GDS gets huge OASIS (SEMI P39) can store a repeated shape as one record plus a repetition, so contact, via, and fill fields take less space than in GDSII; unique polygons do not get smaller. LayoutEditor window: an L-shaped line and a lone line drawn in black outline over their OPC-corrected mask shapes in amber, with ears at line ends and corners and two thin assist bars Optical proximity correction (OPC) Optical proximity correction changes the mask after layout, with serifs, hammerheads, biases, and assist bars, so that the printed pattern matches the drawn shapes. Puts a small square on the origin, and a device in each quadrant around it. Layout origin and quadrants: where (0,0) sits and which way Y grows Every cell has an origin and a Y direction. Disagree on zero or up, and every instance lands in the wrong place. One path at one width: a ribbon that runs right, turns up, and runs right again. Paths in layout: centerline, width, end caps, and bends A layout path stores a centerline and one width. How end caps and corners are built, when a path turns into a polygon, and how a wrong cap causes an open or a short. Illustration: close-up of a bare circuit board with no solder mask, copper traces and round copper pads on yellow-green fiberglass. PCB copper is a layer too Board copper foil is still a named layer — traces, pads, and pours on a sheet, not chip metal film. Three square arrays side by side in LayoutEditor: a small 3 by 3 teal grid, a 9 by 8 teal grid, and a 9 by 8 amber grid with wider gaps PCells: cells with knobs A parameterized cell is a layout recipe: set width, counts, or pitch, and a script builds or reuses a uniquely named cell. LayoutEditor macros, naming, and what you freeze before the fab. The drawn pair you can see before any recipe runs: a small square inside a larger square, the cut you typed and the metal around it. Process layers versus drawing layers Some sheets become matter. Some sheets are notes to tools and humans. Do not chrome the notes. One output wire neighborhood drawn with sky130 layer numbers; every shape tagged with its number pair, layer name, and purpose Reading a layer map How to turn a factory's table of number pairs into names, purposes, and masks — so you know which shapes become metal and which are only notes. Freezes the two landings. Orange dots mark a regular pitch. Snapping, and the quiet disaster of off-grid points The magnet on your cursor is how drawings stay manufacturable. Turn it off and you will invent illegal corners. Illustration: a silicon wafer on a dark chuck under yellow cleanroom light, rectangular exposure fields tiling the disc and partial fields cut off at the round edge. Steppers and why size matters The machine prints a field, then steps. Your die has to fit that window, not only the wafer. LayoutEditor window during a stretch: two SKY130 met1 joints with the right strap ends and right pads point-selected and the move preview outlined to the right Select, move, stretch, copy: editing layout without breaking it How the selection in LayoutEditor decides between move and stretch, why a pad moved alone opens a joint without a DRC error, which SKY130 rules a stretch can break, and how copies differ from cell references, with tested LayoutScript and .ledrc examples. Makes one of those papers the subject. Orange dots sit on a regular pitch, in rows and columns. Layout grids: display grid, database unit, and manufacturing grid A corner can sit on the display grid and still miss the manufacturing grid. How the three grids differ, and why an off-grid corner is rounded by the mask writer and can fail a space check. Illustration: a silicon photonics die on a lab stage with a cleaved optical fiber aligned to its polished edge where the waveguides end Waveguide layout: bend radius, width, and paths on a photonic chip A waveguide is a path that light follows. Width sets the mode, a tight bend radiates, and the bend radius is part of the device, not a routing convenience. LayoutEditor window after a DRC run on SKY130 metal 1: a wide amber strap that the deck classified as huge metal, thin blue wires, and two red markers What a DRC rule deck is A DRC rule deck is the file that turns a rule manual into layer definitions, derived layers, checks, and named report categories that a design-rule-check tool runs on a layout. A small stack with every sheet visible: a navy metal strap across the top, a gold gate strip crossing a teal conductor, contact squares at both ends, and two separate teal bars below. What a layer is for: layer numbers, purposes, and hiding sheets A layer is a sheet the factory spends a process step on. GDS layer/datatype pairs with real SKY130 numbers, drawn vs derived layers, and why hiding a layer is a filter, not a delete. Named process layers from a kit meeting in one filled device and routing neighborhood What a PDK actually contains The factory's package of layer names, rules, cells, and models — so your drawing tools speak the process. A square quartz photomask tilted against a dark room: a dense dark chrome pattern of lines and blocks in the middle of the clear glass, with an empty glass border around it What is a photomask? The glass plate that prints a chip A photomask, also called a reticle, is a quartz plate with a chrome pattern. Light shines through it to copy one layer of a chip onto a wafer, and a chip needs a stack of them. A crop of a real standard-cell block at a 0.5 µm scale bar. What is a layout, really? Shapes, layers, units, and cells Not a picture of a chip: a file of integer coordinates on numbered layers, grouped into cells, that a factory turns into masks. What GDSII stores, why a screenshot is not a layout, and what to check before you send one. Part of a real logic cell, a half adder from the open SkyWater SKY130 cell library, showing li1, its lowest wiring layer. When the computer moves an edge Sizing moves every edge of a shape outward or inward by the same distance. Masks, solder openings, and rule checks depend on it, and corners, narrow necks, and unmerged pieces are where it surprises you. One crop, shown four ways, from a real sky130 block named encoder_top. Who actually reads a layout? The same drawing is read by your eyes, a geometry checker, a connectivity check, a mask shop, and scripts that never see your colors. Illustration, not a photograph: a human hair drawn as a magnified cylinder marked about 80 µm across, a round zoom inset with a 1 µm scale bar, and a magnifying glass with a 1 nm scale bar noting that 1 nm is 1/1000 of 1 µm Why chip people live in microns Micrometers are the hallway unit for chip sizes; the file stores integer ticks, and a wrong unit silently resizes the chip. The small job, the one a person can still see and still count. Why people write layout scripts Because a thousand polite rectangles should not be a career. Record, repeat, parameterize. LayoutEditor window: on the left two L-shaped teal metal 1 straps, 0.20 µm wide, with a wide 0.30 µm gap between their parallel runs; on the right two navy metal 2 straps with a much tighter gap, the upper one far thinner than its partner Width and space The two oldest rules: don’t be skinny, don’t cuddle. Everything else is a variation.

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An independent knowledge base on layout — chips, MEMS, masks, and boards — written so a newcomer can follow the drawing, not only the jargon.